Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu was written by Jang, Yujin;Kim, Jun Beom;Hong, Tae Eun;Yeo, So Jeong;Lee, Sunju;Jung, Eun Ae;Park, Bo Keun;Chung, Taek-Mo;Kim, Chang Gyoun;Lee, Do-Joong;Lee, Han-Bo-Ram;Kim, Soo-Hyun. And the article was included in Journal of Alloys and Compounds in 2016.Quality Control of Sodium 2-methyl-2-propanethiolate This article mentions the following:
Molybdenum nitride (Mo2N) thin films were grown by at. layer deposition (ALD) using a sequential supply of a newly synthesized Mo metalorganic precursor, Mo(NtBu)2(StBu)2, and H2 plasma at a substrate temperature of 300 掳C. A newly proposed ALD system exhibited typical ALD characteristics, such as a self-limited film growth and a linear dependency of the film thickness on the number of ALD cycles, and showed a growth rate of 0.028 nm/cycle on a thermally grown SiO2 substrate. Such the ideal ALD growth characteristics enabled excellent step coverage of 鈭?0% for the ALD-grown Mo2N film onto nano-trenches with a width of 25 nm and an aspect ratio 鈭?.5. The optimized film had a resistivity as low as 鈭?50 渭惟-cm. X-ray diffraction, Rutherford backscattering spectrometry, and XPS analyses confirmed that formation of N-rich cubic Mo2N (N/Mo = 鈭?.7) phase with carbon and sulfur impurities of 2.6 and 7.4 at.%, resp. Plan-view transmission electron microscopy anal. showed that the film formed a nanocrystalline microstructure with 5-8-nm-sized grains embedded in an amorphous matrix. An ultrathin (only 鈭? nm-thick) ALD-grown Mo2N film effectively prevented diffusion of Cu into Si after annealing at a temperature even up to 650 掳C. In the experiment, the researchers used many compounds, for example, Sodium 2-methyl-2-propanethiolate (cas: 29364-29-2Quality Control of Sodium 2-methyl-2-propanethiolate).
Sodium 2-methyl-2-propanethiolate (cas: 29364-29-2) belongs to alcohols. The oxygen atom of the strongly polarized O鈥旽 bond of an alcohol pulls electron density away from the hydrogen atom. This polarized hydrogen, which bears a partial positive charge, can form a hydrogen bond with a pair of nonbonding electrons on another oxygen atom. Grignard and organolithium reagents are powerful tools for organic synthesis, and the most common products of their reactions are alcohols.Quality Control of Sodium 2-methyl-2-propanethiolate
Referemce:
Alcohol – Wikipedia,
Alcohols – Chemistry LibreTexts